Result: Process control in low pressure capacitive radio frequency plasmas based on kinetic simulations
Title:
Process control in low pressure capacitive radio frequency plasmas based on kinetic simulations / Li Wang ; Gutachter: Julian Schulze, Zoltan Donko ; Fakultät für Elektrotechnik und Informationstechnik
Published:
Bochum : Ruhr-Universität Bochum, 2024
Scope:
1 Online-Ressource
Format:
Language:
English
Dissertation note:
Dissertation, Bochum, Ruhr-Universität Bochum, 2023
Subject Added Keywords: