Result: Epitaxial growth of highly textured ZnO thin films on Si using an AlN buffer layer by atomic layer deposition

*Title*:

*Author/editor-in-chief*:

*Publication*:

Freiburg : Universität, 2021

*Physical description scale*:

1 Online-Ressource

*Format*:

*eBook*

*Language*:

*eng*

*Notes*:

Journal of vacuum science & technology. A, Vacuum, surfaces, and films. - 39, 3 (2021) , 032401, ISSN: 1520-8559

*DOI*:

10.1116/6.0000793

*Result*: Epitaxial growth of highly textured ZnO thin films on Si using an AlN buffer layer by atomic layer deposition