*Result*: Novel Reactor Design and Method for Atmospheric Pressure Chemical Vapor Deposition of Micro and Nano SiO2-x Films in Photovoltaic Applications
*Title*:
Novel Reactor Design and Method for Atmospheric Pressure Chemical Vapor Deposition of Micro and Nano SiO2-x Films in Photovoltaic Applications / Esmail Issa ; Gutachter: Thomas Hannappel, Carsten Ronning ; Betreuer: Edda Rädlein
*Author/editor-in-chief*:
*Publication*:
Ilmenau : TU Ilmenau, 2022
*Physical description scale*:
1 Online-Ressource (242 Seiten)
*Format*:
*Language*:
*eng*
*Notes*:
In: Werkstofftechnik aktuell(26) - ISSN 1868-6532
In: Universitätsverlag Ilmenau, Ilmenau
In: Universitätsverlag Ilmenau, Ilmenau
*Subject Added Keywords*: