*Result*: Enhanced Conductivity and Microstructure in Highly Textured TiN1−x/c‑Al2O3 Thin Films

*Title*:
Enhanced Conductivity and Microstructure in Highly Textured TiN1−x/c‑Al2O3 Thin Films / Alexander Zintler, Robert Eilhardt, Stefan Petzold, Sharath Ulhas, Enrico Bruder, Nico Kaiser, Lambert Alff, Leopoldo Molina-Luna
*Published in*:
ACS omega. - Washington, DC : ACS Publications, [2016]-. - Online-Ressource. - ISSN 2470-1343. - (2022), Artikel-ID: 1c05505
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*Manufacture*:
2022
*Format*:
*eArticle*
*Language*:
*eng*
*DOI*:
10.1021/acsomega.1c05505