Result: The role of metal catalysts during metal-assisted chemical etching of silicon

*Title*:

*Author/editor-in-chief*:

*Corporate*:

*Publication*:

Freiburg : Universität, 2021

*Physical description scale*:

1 Online-Ressource

*Format*:

*eBook*

*Language*:

*eng*

*Dissertation note*:

Dissertation, Universität Freiburg, 2021

*Subject Added Keywords*:

*DOI*:

10.6094/UNIFR/222795

*Result*: The role of metal catalysts during metal-assisted chemical etching of silicon