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Result: Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications

*Title*:

Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications / Juliette Cardoletti

*Author/editor-in-chief*:

Cardoletti, Juliette (Verfasser) ; Alff, Lambert (Akademischer Betreuer) ; Kupnik, Mario (Akademischer Betreuer)

*Corporate*:

Technische Universität Darmstadt (Grad-verleihende Institution)

*Publication*:

Darmstadt : Universitäts- und Landesbibliothek, 2021

*Physical description scale*:

1 Online-Ressource

*Format*:

*eBook*

*Language*:

*eng*

*Dissertation note*:

Dissertation, Technische Universität Darmstadt, 2021

*Notes*:

kostenfrei

*RVK-Notation*:

*UP 7550* *ZN 3430*

*Subject Added Keywords*:

*DOI*:

10.26083/tuprints-00019663

*oa_rights*:

Open Access
CC BY-NC-ND 4.0