*single_record_view*: The conductivity behavior of zinc oxide deposited by atomic layer deposition

*Title*:

*Author/editor-in-chief*:

*Corporate*:

*Publication*:

Freiburg : Universität, 2018

*Physical description scale*:

Online-Ressource

*Format*:

*eBook*

*Language*:

*eng*

*Dissertation note*:

Dissertation, Albert-Ludwigs-Universität Freiburg, 2018

*Subject Added Keywords*:

*DOI*:

10.6094/UNIFR/15245

*Result*: The conductivity behavior of zinc oxide deposited by atomic layer deposition