*Result*: Foundations of MEMS
*Title*:
Foundations of MEMS / Chang Liu
*Author/editor-in-chief*:
*Publication*:
Englewood Cliffs, N.J. [u.a] : Prentice Hall, 2006
*Physical description scale*:
XXII, 530 S.
*Format*:
*Language*:
*eng*
*RVK-Notation*:
*Subject Added Keywords*:
*ISBN*:
0131472860