Result: Process control in low pressure capacitive radio frequency plasmas based on kinetic simulations

*Title*:

Process control in low pressure capacitive radio frequency plasmas based on kinetic simulations / Li Wang ; Gutachter: Julian Schulze, Zoltan Donko ; Fakultät für Elektrotechnik und Informationstechnik

*Author/editor-in-chief*:

*Corporate*:

*Publication*:

Bochum : Ruhr-Universität Bochum, 2024

*Physical description scale*:

1 Online-Ressource

*Format*:

*eBook*

*Language*:

*eng*

*Dissertation note*:

Dissertation, Bochum, Ruhr-Universität Bochum, 2023

*Subject Added Keywords*:

*Result*: Process control in low pressure capacitive radio frequency plasmas based on kinetic simulations