Result: Hierarchical microstructure growth in a precursor‐derived SiOC thin film prepared on silicon substrate

*Title*:

Hierarchical microstructure growth in a precursor‐derived SiOC thin film prepared on silicon substrate / Emmanuel III Ricohermoso, Eva Heripre, Susana Solano‐Arana, Ralf Riedel, Emanuel Ionescu

*Author/editor-in-chief*:

*Published in*:

International journal of applied ceramic technology. - Westerville, Ohio : [Verlag nicht ermittelbar], 2004-. - Online-Ressource. - 10.1111/(ISSN)1744-7402. - ISSN 1744-7402. - Band 20, Heft 2 (2023), Seite 735-746
*show_all_articles*

*Manufacture*:

2023

*Format*:

*eArticle*

*Language*:

*eng*

*Notes*:

kostenfrei

*DOI*:

10.1111/ijac.14185

*oa_rights*:

Open Access
CC BY 4.0

*Result*: Hierarchical microstructure growth in a precursor‐derived SiOC thin film prepared on silicon substrate