• Enhanced Conductivity and Micr...
  • *Holdings*

*Result*: Enhanced Conductivity and Microstructure in Highly Textured TiN1–x/c-Al2O3 Thin Films

*Title*:
Enhanced Conductivity and Microstructure in Highly Textured TiN1–x/c-Al2O3 Thin Films / Alexander Zintler, Robert Eilhardt, Stefan Petzold, Sankaramangalam Ulhas Sharath, Enrico Bruder, Nico Kaiser, Lambert Alff, Leopoldo Molina-Luna
*Author/editor-in-chief*:
Zintler, Alexander (Verfasser) ; Eilhardt, Robert (Verfasser) ; Petzold, Stefan (Verfasser) ; Sharath, Sankaramangalam Ulhas (Verfasser) ; Bruder, Enrico (Verfasser) ; Kaiser, Nico (Verfasser) ; Alff, Lambert (Verfasser) ; Molina-Luna, Leopoldo (Verfasser) 
*Published in*:
ACS omega. - Washington, DC : ACS Publications, [2016]-. - Online-Ressource. - ISSN 2470-1343. - Band 7, Heft 2 (2022), Seite 2041-2048
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*Publication*:
Darmstadt : Universitäts- und Landesbibliothek Darmstadt, 2022
*Format*:
*eArticle*
*Language*:
*eng*
*Notes*:
kostenfrei
*DOI*:
10.26083/tuprints-00021222
*oa_rights*:
Open Access
CC BY-NC-ND 4.0

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