• REDM: Regression-Guided Diffus...

*Result*: REDM: Regression-Guided Diffusion Modeling for Universal Soft Sensor Enhancement in Semiconductor Process Control

Title:
REDM: Regression-Guided Diffusion Modeling for Universal Soft Sensor Enhancement in Semiconductor Process Control
Authors:
Xie, Weiping, Shi, Yumeng, Guo, Pang, Chen, Yining
Source:
2026 31st Asia and South Pacific Design Automation Conference (ASP-DAC) Design Automation Conference (ASP-DAC), 2026 31st Asia and South Pacific. :8-14 Jan, 2026
Relation:
2026 31st Asia and South Pacific Design Automation Conference (ASP-DAC)
Database:
IEEE Xplore Digital Library