• A Digital Twin Framework With...

*Result*: A Digital Twin Framework With Deep Feature Extraction and Gaussian Process for Multi-Objective Optimization in Semiconductor Manufacturing

Title:
A Digital Twin Framework With Deep Feature Extraction and Gaussian Process for Multi-Objective Optimization in Semiconductor Manufacturing
Authors:
Lin, C., Tseng, T., Tsai, T.
Source:
IEEE Transactions on Automation Science and Engineering IEEE Trans. Automat. Sci. Eng. Automation Science and Engineering, IEEE Transactions on. 23:1928-1949 2026
Database:
IEEE Xplore Digital Library