• Lensless Through-Silicon Micro...

Treffer: Lensless Through-Silicon Microscopy System for Precise Alignment in Photonic Integration Processes

Title:
Lensless Through-Silicon Microscopy System for Precise Alignment in Photonic Integration Processes
Authors:
Vlasov, Aleksandr, Shevkunov, Igor, Egiazarian, Karen, Gurovich, Andrei, Rozhkov, Denis, Narhi, Mikko, Viheriala, Jukka, Guina, Mircea
Source:
2025 25th European Microelectronics and Packaging Conference & Exhibition (EMPC) Microelectronics and Packaging Conference & Exhibition (EMPC), 2025 25th European. :1-5 Sep, 2025
Relation:
2025 25th European Microelectronics and Packaging Conference & Exhibition (EMPC)
Database:
IEEE Xplore Digital Library